Wafer cleaning module and method for cleaning the surface of a substrate

Application number :: 2002211485
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Wafer cleaning module and method for cleaning the surface of a substrate
Inventor :: Gotkis, Yehiel
Agent name :
Address for service :
Filing date :: 04 October 2001
Associated companies :
Applicant name :: Lam Research Corporation
Applicant address :
Old name :
Original Source :: Go

Wafer cleaning module and method for cleaning the surface of a substrate A Standard patent application filed on 04 October 2001 credited to Gotkis, Yehiel