Wafer carrier with groove for decoupling retainer ring from wafer
A Standard patent application filed on 29 June 2001 credited to Gotkis, Yehiel ; Owczerz, Aleksander A.

Details

Application number :

2001279277  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Wafer carrier with groove for decoupling retainer ring from wafer  

Inventor :

Gotkis, Yehiel ; Owczerz, Aleksander A.  

Agent name :

 

Address for service :

 

Filing date :

29 June 2001  

Associated companies :

 

Applicant name :

Lam Research Corporation  

Applicant address :

 

Old name :

 

Original Source :

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