Details

Application number :
2002256365  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
System and method for filtering output in mass flow controllers and mass flow meters  
Inventor :
Faisal, Tariq  
Agent name :
 
Address for service :
 
Filing date :
26 April 2002  
Associated companies :
 
Applicant name :
MYKROLIS CORPORATION  
Applicant address :
129 Concord Road Billerica, MA 01821-4600 United States of America  
Old name :
 
Original Source :
Go  

Same Inventor