System and method of operation of a digital mass flow controller
A Standard patent application filed on 21 June 2000 credited to Tariq, Faisal ; Tinsley, Kenneth E.

Details

Application number :

54987  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

System and method of operation of a digital mass flow controller  

Inventor :

Tariq, Faisal ; Tinsley, Kenneth E.  

Agent name :

 

Address for service :

 

Filing date :

21 June 2000  

Associated companies :

 

Applicant name :

Millipore Corporation  

Applicant address :

 

Old name :

 

Original Source :

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