Apparatus and methods for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing
A Standard patent application filed on 28 March 2002 credited to Saldana, Miguel A. ; Williams, Damon Vincent

Details

Application number :

2002254492  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Apparatus and methods for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing  

Inventor :

Saldana, Miguel A. ; Williams, Damon Vincent  

Agent name :

 

Address for service :

 

Filing date :

28 March 2002  

Associated companies :

 

Applicant name :

LAM RESEARCH CORPORATION  

Applicant address :

4650 Cushing Parkway, Fremont, CA 94538  

Old name :

 

Original Source :

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