Structural reinforcement of highly porous low k dielectric films by cu diffusion barrier structures
A Standard patent application filed on 18 December 2001 credited to Wong, Lawrence D.
Details
Application number :
2002231330
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Structural reinforcement of highly porous low k dielectric films by cu diffusion barrier structures