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Chemical-mechanical polishing slurry and method
A Standard patent application filed on 09 October 2001 credited to Srinivasan, Ramanathan ; Her, Yie-Shein ; Babu, Suryadevara ; Ramarajan, Suresh
Details
Application number :
2001296713
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Chemical-mechanical polishing slurry and method
Inventor :
Srinivasan, Ramanathan ; Her, Yie-Shein ; Babu, Suryadevara ; Ramarajan, Suresh
Agent name :
Address for service :
Filing date :
09 October 2001
Associated companies :
Applicant name :
Ferro Corporation
Applicant address :
Old name :
Original Source :
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