Fluid distribution system and process, and semiconductor fabrication facility utilizing same
A Standard patent application filed on 23 July 2001 credited to Dietz, James A. ; Tabler, Terry A. ; Wang, Luping

Details

Application number :

2001277122  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Fluid distribution system and process, and semiconductor fabrication facility utilizing same  

Inventor :

Dietz, James A. ; Tabler, Terry A. ; Wang, Luping  

Agent name :

 

Address for service :

 

Filing date :

23 July 2001  

Associated companies :

 

Applicant name :

Advanced Technology Materials, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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