Slurries of abrasive inorganic oxide particles and method for polishing copper containing surfaces
A Standard patent application filed on 11 April 2001 credited to Pryor, James Neil
Details
Application number :
2001255290
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Slurries of abrasive inorganic oxide particles and method for polishing copper containing surfaces
Inventor :
Pryor, James Neil
Agent name :
Davies Collison Cave
Address for service :
1 Nicholson Street Melbourne VIC 3000 Australia
Filing date :
11 April 2001
Associated companies :
Applicant name :
W. R. Grace & Co.-Conn.
Applicant address :
7500 Grace Drive Columbia MD 21044 United States of America