Method of controlling photoresist stripping process and regenerating photoresist stripper composition based on near infrared spectrometer
A Standard patent application filed on 27 March 2001 credited to Kang, Cheol-Woo
;
Kim, Jong-Min
;
Yim, Yoon-Gil
;
Park, Tae-Joon
;
Park, Mi-Sun
Details
Application number :
2001244789
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method of controlling photoresist stripping process and regenerating photoresist stripper composition based on near infrared spectrometer
Inventor :
Kang, Cheol-Woo
;
Kim, Jong-Min
;
Yim, Yoon-Gil
;
Park, Tae-Joon
;
Park, Mi-Sun