Flat motor device and assembly method thereof, flat motor device driving method,stage device and driving method thereof, exposure system and exposure method, a nd device and production method thereof
A Standard patent application filed on 14 December 1999 credited to Tanaka, Keiichi

Details

Application number :
16854  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Flat motor device and assembly method thereof, flat motor device driving method,stage device and driving method thereof, exposure system and exposure method, a nd device and production method thereof  
Inventor :
Tanaka, Keiichi  
Agent name :
 
Address for service :
 
Filing date :
14 December 1999  
Associated companies :
 
Applicant name :
Nikon Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor