Method and apparatus for the treatment of substrates
A Standard patent application filed on 28 December 2000 credited to Granneman, Ernst Hendrik August ; Terhorst, Herbert ; Storm, Arjen Benjamin ; Kuznetsov, Vladimir Ivanovich

Details

Application number :

32467  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for the treatment of substrates  

Inventor :

Granneman, Ernst Hendrik August ; Terhorst, Herbert ; Storm, Arjen Benjamin ; Kuznetsov, Vladimir Ivanovich  

Agent name :

 

Address for service :

 

Filing date :

28 December 2000  

Associated companies :

 

Applicant name :

ASM International N.V.  

Applicant address :

 

Old name :

 

Original Source :

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