A microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece
A Standard patent application filed on 03 January 2001 credited to Hanson, Kyle M. ; Oberlitner, Thomas H.

Details

Application number :

27578  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

A microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece  

Inventor :

Hanson, Kyle M. ; Oberlitner, Thomas H.  

Agent name :

 

Address for service :

 

Filing date :

03 January 2001  

Associated companies :

 

Applicant name :

Semitool, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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