Amorphization of substrate to prevent silicide encroachment into channel region of field effect transistor
A Standard patent application filed on 12 November 1999 credited to Bai, Gang
;
Tsai, Julie A.
;
Jan, Chia-Hong
;
Jacob, Pauline N.
Details
Application number :
16217
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Amorphization of substrate to prevent silicide encroachment into channel region of field effect transistor
Inventor :
Bai, Gang
;
Tsai, Julie A.
;
Jan, Chia-Hong
;
Jacob, Pauline N.