Method for fabricating micro-structures with various surface properties in multilayer body by plasma etching
A Standard patent application filed on 30 January 2001 credited to Schmidt, Walter
;
Reymond, Frederic
;
Rossier, Joel S.
Details
Application number :
26617
Application type :
Standard
Application status :
CEASED
Under opposition :
No
Proceeding type :
Invention title :
Method for fabricating micro-structures with various surface properties in multilayer body by plasma etching
Inventor :
Schmidt, Walter
;
Reymond, Frederic
;
Rossier, Joel S.
Agent name :
Davies Collison Cave
Address for service :
Level 15 1 Nicholson Street MELBOURNE VIC 3000
Filing date :
30 January 2001
Associated companies :
Applicant name :
DiagnoSwiss S.A.
Applicant address :
Rte de l'Ile-au Bois 2, c/o Cimo S.A., Case Postale, CH-1870 Monthey, Switzerland
Old name :
Reymond, Frederic
;
Rossier, Joel S.
;
Schmidt, Walter