Details
- Application number :
- 2013200890
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Device and method for optical image correction in metrology systems
- Inventor :
- Sharonov, Alexey
- Agent name :
- Spruson & Ferguson
- Address for service :
-
- Filing date :
-
- Associated companies :
-
- Applicant name :
-
- Applicant address :
-
- Old name :
-
- Original Source :
- Go