Bowl, spin, rinse, and dry module, and method for loading a semiconductor wafer into a spin, rinse, and dry module
A Standard patent application filed on 20 December 2000 credited to Bliven, Brian M. ; Pascal, Roy Winston

Details

Application number :

24524  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Bowl, spin, rinse, and dry module, and method for loading a semiconductor wafer into a spin, rinse, and dry module  

Inventor :

Bliven, Brian M. ; Pascal, Roy Winston  

Agent name :

 

Address for service :

 

Filing date :

20 December 2000  

Associated companies :

 

Applicant name :

Lam Research Corporation  

Applicant address :

 

Old name :

 

Original Source :

Go