Process of isolation in integrated circuit fabrication, using an antireflective coating
A Standard patent application filed on 20 August 1998 credited to Iyer, Ravi ; Yin, Zhiping ; Glass, Thomas R ; Mcdonald, Steven M.

Details

Application number :

91097  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Process of isolation in integrated circuit fabrication, using an antireflective coating  

Inventor :

Iyer, Ravi ; Yin, Zhiping ; Glass, Thomas R ; Mcdonald, Steven M.  

Agent name :

 

Address for service :

 

Filing date :

20 August 1998  

Associated companies :

 

Applicant name :

Micron Technology, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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