Ultra-broadband uv microscope imaging system with wide range zoom capability
A Standard patent application filed on 07 August 1998 credited to Shafer, David Ross ; Tsai, Bin-Ming Benjamin ; Chuang, Yung-Ho

Details

Application number :

90167  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Ultra-broadband uv microscope imaging system with wide range zoom capability  

Inventor :

Shafer, David Ross ; Tsai, Bin-Ming Benjamin ; Chuang, Yung-Ho  

Agent name :

 

Address for service :

 

Filing date :

07 August 1998  

Associated companies :

 

Applicant name :

Kla-Tencor, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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