Substrate-holding device, substrate-holding method and exposure device

Application number :: 90009
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Substrate-holding device, substrate-holding method and exposure device
Inventor :: Michimoto, Takahiro
Agent name :
Address for service :
Filing date :: 09 September 1998
Associated companies :
Applicant name :: Nikon Corporation
Applicant address :
Old name :
Original Source :: Go

Substrate-holding device, substrate-holding method and exposure device A Standard patent application filed on 09 September 1998 credited to Michimoto, Takahiro