Transfer device for semiconductor wafers
A Standard patent application filed on 08 September 1998 credited to Blattner, Jakob ; Balg, Christian ; Strasser, Bernhard ; Schmid, Hans

Details

Application number :

88508  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Transfer device for semiconductor wafers  

Inventor :

Blattner, Jakob ; Balg, Christian ; Strasser, Bernhard ; Schmid, Hans  

Agent name :

 

Address for service :

 

Filing date :

08 September 1998  

Associated companies :

 

Applicant name :

Tec-Sem AG  

Applicant address :

 

Old name :

 

Original Source :

Go