Apparatus and method for in-situ thickness and stoichiometry measurement of thin films
A Standard patent application filed on 19 August 1998 credited to Levy, Yuval
;
Kelson, Itzhak
Details
Application number :
88479
Application type :
Standard
Application status :
CEASED
Under opposition :
No
Proceeding type :
Invention title :
Apparatus and method for in-situ thickness and stoichiometry measurement of thin films
Inventor :
Levy, Yuval
;
Kelson, Itzhak
Agent name :
Davies Collison Cave
Address for service :
GPO Box 3876 SYDNEY NSW 2001
Filing date :
19 August 1998
Associated companies :
Applicant name :
Triumf
Applicant address :
4004 Wesbrook Mall, Vancouver B.C. V6T 2A3 Canada
Old name :
University of Alberta, Simon Fraser University, The University of Victoria, and The University of British Columbia, doing business as Triumf, The