Reference mark, method for recognizing reference marks and method for object measuring
A Standard patent application filed on 26 June 1998 credited to Michaelis, Martin
;
Caesar, Torsten
Details
Application number :
88013
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Reference mark, method for recognizing reference marks and method for object measuring