Fourier filtering mechanism for inspecting wafers
A Standard patent application filed on 05 August 1998 credited to Montesanto, Steve ; Brunner, Rudolph ; Perelman, Gershon

Details

Application number :

87702  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Fourier filtering mechanism for inspecting wafers  

Inventor :

Montesanto, Steve ; Brunner, Rudolph ; Perelman, Gershon  

Agent name :

 

Address for service :

 

Filing date :

05 August 1998  

Associated companies :

 

Applicant name :

Kla-Tencor Corporation  

Applicant address :

 

Old name :

 

Original Source :

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