Multi-spectroscopic emission line control for thin film sputtering process
A Standard patent application filed on 27 July 1998 credited to Marshall, Craig H. ; Del Cueto, Joseph A.

Details

Application number :

87623  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Multi-spectroscopic emission line control for thin film sputtering process  

Inventor :

Marshall, Craig H. ; Del Cueto, Joseph A.  

Agent name :

 

Address for service :

 

Filing date :

27 July 1998  

Associated companies :

 

Applicant name :

Lockheed Martin Corporation  

Applicant address :

 

Old name :

 

Original Source :

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