Fabrication system, method and apparatus for microelectromechanical devices
A Standard patent application filed on 21 May 1998 credited to Johnson, A. David ; Nowicki, Ronald S ; Busta, Heinz H.

Details

Application number :

87567  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Fabrication system, method and apparatus for microelectromechanical devices  

Inventor :

Johnson, A. David ; Nowicki, Ronald S ; Busta, Heinz H.  

Agent name :

 

Address for service :

 

Filing date :

21 May 1998  

Associated companies :

 

Applicant name :

Tini Alloy Company  

Applicant address :

 

Old name :

 

Original Source :

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