Method and apparatus for inspecting a workpiece
A Standard patent application filed on 26 June 1998 credited to Roy, Rajiv ; Wahawisan, Weerakiat ; Zemek, Michael C.

Details

Application number :

84728  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for inspecting a workpiece  

Inventor :

Roy, Rajiv ; Wahawisan, Weerakiat ; Zemek, Michael C.  

Agent name :

 

Address for service :

 

Filing date :

26 June 1998  

Associated companies :

 

Applicant name :

Semiconductor Technologies & Instruments, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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