Wafer reader including a mirror assembly for reading wafer scribes without displacing wafers
A Standard patent application filed on 19 June 1998 credited to Pasic, Robert A.

Details

Application number :

81537  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Wafer reader including a mirror assembly for reading wafer scribes without displacing wafers  

Inventor :

Pasic, Robert A.  

Agent name :

 

Address for service :

 

Filing date :

19 June 1998  

Associated companies :

 

Applicant name :

Pasic Engineering, Ing.  

Applicant address :

 

Old name :

 

Original Source :

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