Method and apparatus for spin-coating chemicals
A Standard patent application filed on 29 May 1998 credited to Batchelder, William T. ; Mahneke, Peter

Details

Application number :

78034  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for spin-coating chemicals  

Inventor :

Batchelder, William T. ; Mahneke, Peter  

Agent name :

 

Address for service :

 

Filing date :

29 May 1998  

Associated companies :

 

Applicant name :

Fairchild Corporation, The  

Applicant address :

 

Old name :

 

Original Source :

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