Vertical furnace for the treatment of semiconductor substrates
A Standard patent application filed on 05 May 1998 credited to Buijze, Jacobus Pieter ; Stohr, Hubertus Johannes Julius ; De Ridder, Christianus Gerardus Maria ; Stoutjesdijk, Jeroen Jan

Details

Application number :

74567  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Vertical furnace for the treatment of semiconductor substrates  

Inventor :

Buijze, Jacobus Pieter ; Stohr, Hubertus Johannes Julius ; De Ridder, Christianus Gerardus Maria ; Stoutjesdijk, Jeroen Jan  

Agent name :

 

Address for service :

 

Filing date :

05 May 1998  

Associated companies :

 

Applicant name :

ASM International N.V.  

Applicant address :

 

Old name :

 

Original Source :

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