Method of forming metallic and ceramic thin film structures using metal halides and alkali metals
A Standard patent application filed on 03 April 1998 credited to Zachariah, Michael R.
;
Hendricks, Jay H.
Details
Application number :
73577
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method of forming metallic and ceramic thin film structures using metal halides and alkali metals