Apodizing filter system useful for reducing spot size in optical measurements and for other applications
A Standard patent application filed on 07 April 1998 credited to Norton, Adam E. ; Carter, Joseph R. ; Johnson, Kenneth C.

Details

Application number :

68922  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Apodizing filter system useful for reducing spot size in optical measurements and for other applications  

Inventor :

Norton, Adam E. ; Carter, Joseph R. ; Johnson, Kenneth C.  

Agent name :

 

Address for service :

 

Filing date :

07 April 1998  

Associated companies :

 

Applicant name :

Kla-Tencor Corporation  

Applicant address :

 

Old name :

 

Original Source :

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