Methods for chemical mechanical polish of organic polymer dielectric films
A Standard patent application filed on 12 March 1998 credited to Towery, Daniel L. ; Hendricks, Neil H.

Details

Application number :

66982  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Methods for chemical mechanical polish of organic polymer dielectric films  

Inventor :

Towery, Daniel L. ; Hendricks, Neil H.  

Agent name :

 

Address for service :

 

Filing date :

12 March 1998  

Associated companies :

 

Applicant name :

Allied-Signal Inc.  

Applicant address :

 

Old name :

 

Original Source :

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