Electron optics for multi-beam electron beam lithography tool
A Standard patent application filed on 23 November 2000 credited to Parker, N. William ; Brodie, Alan D. ; Matter, Michael C. ; Yin, Edward M. ; Guo, George

Details

Application number :

19265  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Electron optics for multi-beam electron beam lithography tool  

Inventor :

Parker, N. William ; Brodie, Alan D. ; Matter, Michael C. ; Yin, Edward M. ; Guo, George  

Agent name :

 

Address for service :

 

Filing date :

23 November 2000  

Associated companies :

 

Applicant name :

Ion Diagnostics, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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