Method of fabrication of a ferro-electric capacitor and method of growing a pzt layer on a substrate
A Standard patent application filed on 30 November 1999 credited to Norga, Gerd
Details
Application number :
15399
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method of fabrication of a ferro-electric capacitor and method of growing a pzt layer on a substrate