Method and apparatus for generating X-ray or EUV radiation
A Standard patent application filed on 25 April 1997 credited to Hertz, Hans M. ; Berglund, Magnus ; Rymell, Lars ; Malmqvist, Lars

Details

Application number :

27207  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for generating X-ray or EUV radiation  

Inventor :

Hertz, Hans M. ; Berglund, Magnus ; Rymell, Lars ; Malmqvist, Lars  

Agent name :

 

Address for service :

 

Filing date :

25 April 1997  

Associated companies :

 

Applicant name :

Jettec AB  

Applicant address :

Starvagen 18 S-227 32 Lund Sweden  

Old name :

 

Original Source :

Go