Modular chemical abatement system and method for semiconductor manufacturing
A Standard patent application filed on 31 October 2000 credited to Getty, James D. ; Moore, Robert R.

Details

Application number :

14519  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Modular chemical abatement system and method for semiconductor manufacturing  

Inventor :

Getty, James D. ; Moore, Robert R.  

Agent name :

 

Address for service :

 

Filing date :

31 October 2000  

Associated companies :

 

Applicant name :

Moore, Robert R.  

Applicant address :

 

Old name :

 

Original Source :

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