Thin film actuated mirror array in an optical projection system and method for manufacturing the same
A Standard patent application filed on 23 January 1997 credited to Jung, Sang Chol
;
Nam, Yun Woo
Details
Application number :
13208
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Thin film actuated mirror array in an optical projection system and method for manufacturing the same