Method and apparatus for cold wall chemical vapor deposition
A Standard patent application filed on 14 August 1996 credited to Cook, Robert C.
;
Brors, Daniel L.
Details
Application number :
68430
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method and apparatus for cold wall chemical vapor deposition
Inventor :
Cook, Robert C.
;
Brors, Daniel L.
Agent name :
Address for service :
Filing date :
14 August 1996
Associated companies :
Applicant name :
Torrex Equipment Corporation
Applicant address :
250 North Mines Road Livermore CA 94550 United States Of America