Process and apparatus for forming thin films of metallic compounds
A Standard patent application filed on 28 December 1995 credited to Tamoto, Junichi
;
Ito, Takashi
;
Narisawa, Seishi
;
Okada, Katsuhisa
Details
Application number :
40761
Application type :
Standard
Application status :
WITHDRAWN
Under opposition :
No
Proceeding type :
Invention title :
Process and apparatus for forming thin films of metallic compounds