Shaped source of soft x-ray, extreme ultraviolet and ultraviolet radiation
A Standard patent application filed on 27 October 1999 credited to Foster, Richard M. ; Turcu, Edmond I. C. ; Morris, James H. ; Rieger, Harry ; Sasian, Jose M.

Details

Application number :

14541  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Shaped source of soft x-ray, extreme ultraviolet and ultraviolet radiation  

Inventor :

Foster, Richard M. ; Turcu, Edmond I. C. ; Morris, James H. ; Rieger, Harry ; Sasian, Jose M.  

Agent name :

 

Address for service :

 

Filing date :

27 October 1999  

Associated companies :

 

Applicant name :

Jmar Research, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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