Beam stop apparatus for an ion implanter
A Standard patent application filed on 07 June 1995 credited to Burgin, David R. ; Todaka, Ryoji ; Wauk, Michael T. ; England, Jonathan G.

Details

Application number :

26772  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Beam stop apparatus for an ion implanter  

Inventor :

Burgin, David R. ; Todaka, Ryoji ; Wauk, Michael T. ; England, Jonathan G.  

Agent name :

 

Address for service :

 

Filing date :

07 June 1995  

Associated companies :

 

Applicant name :

Applied Materials, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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