Process and apparatus for the treatment of semiconductor wafers in a fluid
A Standard patent application filed on 15 July 1994 credited to Matthews, Robert Roger
Details
Application number :
73329
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Process and apparatus for the treatment of semiconductor wafers in a fluid
Inventor :
Matthews, Robert Roger
Agent name :
Cullens Patent and Trade Mark Attorneys
Address for service :
GPO Box 1074 BRISBANE QLD 4001
Filing date :
15 July 1994
Associated companies :
Applicant name :
Legacy Systems, Inc.
Applicant address :
421 Cambridge Road Richardson TX 75080 United States Of America