Details

Application number :
79613  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Semiconductor processor apparatus with dynamic wafer vapor treatment and particle volatilization  
Inventor :
Bergman, Eric J ; Owczarz, Aleksander ; Thompson, Raymon F ; Reardon, Timothy J  
Agent name :
 
Address for service :
 
Filing date :
19 April 1991  
Associated companies :
 
Applicant name :
Semitool, Inc.  
Applicant address :
 
Old name :
 
Original Source :
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