Semiconductor processor apparatus with dynamic wafer vapor treatment and particle volatilization
A Standard patent application filed on 19 April 1991 credited to Bergman, Eric J
;
Owczarz, Aleksander
;
Thompson, Raymon F
;
Reardon, Timothy J
Details
Application number :
79613
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Semiconductor processor apparatus with dynamic wafer vapor treatment and particle volatilization
Inventor :
Bergman, Eric J
;
Owczarz, Aleksander
;
Thompson, Raymon F
;
Reardon, Timothy J