Calibration of a scanning electron microscope
A Standard patent application filed on 11 August 2000 credited to Yee, Jason C. ; Goodstein, David M. ; Liu, Weidong ; Hordon, Laurence S.

Details

Application number :

66333  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Calibration of a scanning electron microscope  

Inventor :

Yee, Jason C. ; Goodstein, David M. ; Liu, Weidong ; Hordon, Laurence S.  

Agent name :

 

Address for service :

 

Filing date :

11 August 2000  

Associated companies :

 

Applicant name :

Kla-Tencor Corporation  

Applicant address :

 

Old name :

 

Original Source :

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