Wafer cascade scrubber
A Standard patent application filed on 26 May 2000 credited to Frost, David T. ; Jones, Oliver David ; Riley, Bryan ; Stephens, Donald E. ; Jones, Anthony ; Petersen, Scott

Details

Application number :
52966  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Wafer cascade scrubber  
Inventor :
Frost, David T. ; Jones, Oliver David ; Riley, Bryan ; Stephens, Donald E. ; Jones, Anthony ; Petersen, Scott  
Agent name :
 
Address for service :
 
Filing date :
26 May 2000  
Associated companies :
 
Applicant name :
Lam Research Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor