Chamber liner for semiconductor process chambers
A Standard patent application filed on 28 September 1999 credited to Schoepp, Alan M. ; Barnes, Michael ; Denty, William M. Jr.

Details

Application number :

11988  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Chamber liner for semiconductor process chambers  

Inventor :

Schoepp, Alan M. ; Barnes, Michael ; Denty, William M. Jr.  

Agent name :

 

Address for service :

 

Filing date :

28 September 1999  

Associated companies :

 

Applicant name :

Lam Research Corporation  

Applicant address :

 

Old name :

 

Original Source :

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