System and method of providing MEMS device with anti-stiction coating
A Standard patent application filed on 03 August 2005 credited to Gally, Brian James
;
Cummings, William J
;
Palmateer, Lauren
Details
Application number :
2005203432
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
System and method of providing MEMS device with anti-stiction coating
Inventor :
Gally, Brian James
;
Cummings, William J
;
Palmateer, Lauren
Agent name :
Madderns Patent & Trade Mark Attorneys
Address for service :
GPO Box 2752 Adelaide SA 5001 Australia
Filing date :
03 August 2005
Associated companies :
Applicant name :
IDC, LLC
Applicant address :
2415 Third Street San Francisco California 94107 United States of America