Smif container including a reticle support structure
A Standard patent application filed on 15 March 2000 credited to Fosnight, William J. ; Wartenbergh, Robert P. ; Shenk, Joshua W. ; Martin, Raymond S.

Details

Application number :

38865  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Smif container including a reticle support structure  

Inventor :

Fosnight, William J. ; Wartenbergh, Robert P. ; Shenk, Joshua W. ; Martin, Raymond S.  

Agent name :

 

Address for service :

 

Filing date :

15 March 2000  

Associated companies :

 

Applicant name :

Asyst Technologies, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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