Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection
A Standard patent application filed on 11 December 2003 credited to Hemker, David ; Bright, Nicolas J. ; Gotkis, Yehiel ; Katz, Vladimir ; Kistler, Rodney

Details

Application number :

2003303494  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection  

Inventor :

Hemker, David ; Bright, Nicolas J. ; Gotkis, Yehiel ; Katz, Vladimir ; Kistler, Rodney  

Agent name :

 

Address for service :

 

Filing date :

11 December 2003  

Associated companies :

 

Applicant name :

LAM RESEARCH CORPORATION  

Applicant address :

4650 Cushing Parkway, Fremont, CA 94538  

Old name :

 

Original Source :

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